[C-9-4] Evaluation of SOI Substrates by Positron Annihilation

Atsushi Ogura, Akira Uedono, Shoichiro Tanigawa (1.Silicon Systems Res. Labs., System Devices and Fundamental Res., NEC Corp., 2.Institute of Applied Physics, University of Tsukuba)

https://doi.org/10.7567/SSDM.2000.C-9-4