[C-9-4] Evaluation of SOI Substrates by Positron Annihilation

Atsushi Ogura、Akira Uedono、Shoichiro Tanigawa (1.Silicon Systems Res. Labs., System Devices and Fundamental Res., NEC Corp.、2.Institute of Applied Physics, University of Tsukuba)

https://doi.org/10.7567/SSDM.2000.C-9-4