[D-1-6] Highly Sensitive MISFET Sensors for Detecting CO Gas Using Porous Platinum and Tungsten Oxide Thin Films

Hisashi Fukuda, Ryuji Zohnishi, Shigeru Nomura (1.Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology)

https://doi.org/10.7567/SSDM.2000.D-1-6