Single Electron Charging Phenomena in Silicon Nano-Pillars With and Without Silicon Nitride Tunnel Barriers

David M. Pooley; Haroon Ahmed; Hiroshi Mizuta; Kazuo Nakazato

doi:https://doi.org/10.7567/SSDM.2000.D-2-8

[D-2-8] Single Electron Charging Phenomena in Silicon Nano-Pillars With and Without Silicon Nitride Tunnel Barriers

David M. Pooley、Haroon Ahmed、Hiroshi Mizuta、Kazuo Nakazato (1.Microelectronics Research Centre, Cavendish Laboratory, Cambridge University、2.Hitachi Cambridge Laboratory, Cavendish Laboratory)

https://doi.org/10.7567/SSDM.2000.D-2-8

2000 International Conference on Solid State Devices and Materials

[D-2-8] Single Electron Charging Phenomena in Silicon Nano-Pillars With and Without Silicon Nitride Tunnel Barriers