[D-6-2] Fabrication of Hollow Cylinder Shape Permalloy on the Si Pole

Youn-Gi Hong、Natsuo Nakamura、Ki-Tae Park、Minoru Sasaki、Hiroyuki Kurino、Kazuhiro Hane、Mitsumasa Koyanagi (1.Department of Machine Intelligence and Systems Engineering, Tohoku University、2.Department of Mechatronics and Precision Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2000.D-6-2