[D-6-2] Fabrication of Hollow Cylinder Shape Permalloy on the Si Pole

Youn-Gi Hong, Natsuo Nakamura, Ki-Tae Park, Minoru Sasaki, Hiroyuki Kurino, Kazuhiro Hane, Mitsumasa Koyanagi (1.Department of Machine Intelligence and Systems Engineering, Tohoku University, 2.Department of Mechatronics and Precision Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2000.D-6-2