[D-7-3] Vertical High Quality Mirrorlike Facet of GaN-Based Device by Reactive Ion Etching

Chin Hsiung Chen, Yan Kuin Su, Shoou Jinn Chang, Jinn Kong Sheu, I Chao Lin (1.Department of Electrical Engineering, National Cheng Kung University)

https://doi.org/10.7567/SSDM.2000.D-7-3