[D-7-3] Vertical High Quality Mirrorlike Facet of GaN-Based Device by Reactive Ion Etching
Chin Hsiung Chen, Yan Kuin Su, Shoou Jinn Chang, Jinn Kong Sheu, I Chao Lin
(1.Department of Electrical Engineering, National Cheng Kung University)
https://doi.org/10.7567/SSDM.2000.D-7-3