[D-7-4] Lateral Thickness Modulation of InGaAs/GaAs Structures by Selective Area MOVPE

T. Terasawa、F. Nakajima、J. Motohisa、T. Fukui (1.Research Center for Interface Quantum Electronics (RCIQE), Hokkaido University)

https://doi.org/10.7567/SSDM.2000.D-7-4