[D-8-3] Initial Stage of InGaAs Growth on GaAs Multiatomic Steps by MOVPE

Sangyoru Lee、Masashi Akabori、Takahiro Shirahata、Junichi Motohisa、Takashi Fukui (1.Research Center for Interface Quantum Electronics, Hokkaido University、2.Air Water Inc., Sakai Research Center Industrial Technology Development)

https://doi.org/10.7567/SSDM.2000.D-8-3