2000 International Conference on Solid State Devices and Materials
Aug 29, 2000 - Aug 31, 2000 Sendai International Center, Sendai, Japan
[E-7-2] MEMS and Optical Applications
Hiroyuki Fujita, Hiroshi Toshiyoshi (1.Center for International Research on MicroMechatronics Institute of Industrial Science, The University of Tokyo)
