MEMS and Optical Applications

Hiroyuki Fujita; Hiroshi Toshiyoshi

doi:https://doi.org/10.7567/SSDM.2000.E-7-2

2000 International Conference on Solid State Devices and Materials

2000年8月29日〜 2000年8月31日
Sendai International Center, Sendai, Japan

[E-7-2] MEMS and Optical Applications

Hiroyuki Fujita、Hiroshi Toshiyoshi (1.Center for International Research on MicroMechatronics Institute of Industrial Science, The University of Tokyo)

https://doi.org/10.7567/SSDM.2000.E-7-2

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