[LB-2-1] Spectroscopic Ellipsometry for the Identification of Paracrystallites in the Ultra-Thin Thermal CVD Hydrogenated Amorphous Silicon Films

Sukti Hazra, Isao Sakata, Mitsuyuki Yamanaka, Eiichi Suzuki (1.Electron Devices Division, Electrotechnical Laboratory)

https://doi.org/10.7567/SSDM.2000.LB-2-1