[LC-2-1] Comparison in Splitting Bonded SOI by Solid and Fluid Wedges (Water and Air Jets)

Kiyofumi Sakaguchi, Kazutaka Yanagita, Hirokazu Kurisu, Hirokazu Suzuki, Kazuaki Ohmi, Takao Yonehara (1.ELTRAN Business Center, Canon Inc.)

https://doi.org/10.7567/SSDM.2000.LC-2-1