[LC-2-1] Comparison in Splitting Bonded SOI by Solid and Fluid Wedges (Water and Air Jets)

Kiyofumi Sakaguchi、Kazutaka Yanagita、Hirokazu Kurisu、Hirokazu Suzuki、Kazuaki Ohmi、Takao Yonehara (1.ELTRAN Business Center, Canon Inc.)

https://doi.org/10.7567/SSDM.2000.LC-2-1