[LE-2-4] The Effect of Organic Compounds Contamination on the Electrical Characteristics of Ultra-Thin Gate Oxide Films

Yoshihide Wakayama、Takeshi Ohkawa、Osamu Nakamura、Sadao Kobayashi、Shigetoshi Sugawa、Herzl Aharoni、Tadahiro Ohmi (1.Department of Electronics Engineering, Graduate School of Engineering, Tohoku University、2.New Industry Creation Hatchery Center, Tohoku University、3.Taisei Corporation、4.At leave from the department of Electrical and Computer Engineering Ben-Gurion University of the Negev Beer-Sheva)

https://doi.org/10.7567/SSDM.2000.LE-2-4