[LE-2-5] Influence of Organic Contaminant on Breakdown Characteristics of MOS Capacitors with Thin SiO2

Takenobu Yoshino、Shin Yokoyama、Tsukuru Suzuki、Toshiaki Fujii (1.Research Center for Nanodevices and Systems, Hiroshima University、2.EBARA, Co., Ltd.)

https://doi.org/10.7567/SSDM.2000.LE-2-5