The Japan Society of Applied Physics

[A-1-3] Global Planarization with Viscosity Control for an Advanced STP Process

N. Sato, K. Machida, M. Yano, K. Kudou, H. Kyuragi (1.NTT Telecommunications Energy Laboratories, NTT Advanced Technology Corporation)

https://doi.org/10.7567/SSDM.2001.A-1-3