[A-1-3] Global Planarization with Viscosity Control for an Advanced STP Process
N. Sato, K. Machida, M. Yano, K. Kudou, H. Kyuragi
(1.NTT Telecommunications Energy Laboratories, NTT Advanced Technology Corporation)
https://doi.org/10.7567/SSDM.2001.A-1-3
