[A-1-6] A Study on Reclaimed Photoresist Developer Using an Electrodialysis Method

Hiroshi Sugawara, Yoshinori Tajima, Tadahiro Ohmi (1.Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 2.Organo Corporation, 3.New Industry Creation Hatchery Center, Tohoku University)

https://doi.org/10.7567/SSDM.2001.A-1-6