[A-10-2-2-2] Electrostatically Levitated Ball MEMS
Risaku Toda, Nobuo Takeda, Takao Murakoshi, Shigeru Nakamura, Masayoshi Esashi
(1.Ball Semiconductor Inc., 2.Tokimec Inc., 3.Tohoku University, New Industry Creation Hatchery Center)
https://doi.org/10.7567/SSDM.2001.A-10-2-2-2