[A-10-2-2-2] Electrostatically Levitated Ball MEMS
Risaku Toda、Nobuo Takeda、Takao Murakoshi、Shigeru Nakamura、Masayoshi Esashi
(1.Ball Semiconductor Inc.、2.Tokimec Inc.、3.Tohoku University, New Industry Creation Hatchery Center)
https://doi.org/10.7567/SSDM.2001.A-10-2-2-2