[A-2-3] The Effect of Organic Contaminations Molecular Weights in the Cleanroom Air on MOS Devices Degradation--a Controlled Laminar Air Flow Experiment

Takeshi Ohkawa, Yoshihide Wakayama, Sadao Kobayashi, Shigetoshi Sugawa, Herzl Aharoni, Tadahiro Ohmi (1.Department of Electronic Engineering, Tohoku University, 2.New Industry Creation Hatchery Center, Tohoku University, 3.Taisei Corporation, 4.Department of Electrical and Computer Engineering Ben-Gurion University of the Negev Beer-Sheva)

https://doi.org/10.7567/SSDM.2001.A-2-3