The Japan Society of Applied Physics

2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

Sep 26, 2001 - Sep 28, 2001
Diamond Hotel, Tokyo, Japan

[A-3-2] Interface Structures Generated by Negative-Bias Temperature Instability in Si/SiO2 and Si/SiOxNy Interfaces

Jiro Ushio, Keiko Kushida-Abdelghafar, Takuya Maruizumi (1.Advanced Research Laboratory, Hitachi, Ltd., 2.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.2001.A-3-2