[A-4-4] A Comparative Examination of Polyoxide Films Performance Grown by Conventional Dry Thermal (900℃) or Plasma Assisted (400℃) Oxidation Techniques

Fuminobu Imaizumi, Tatsufumi Hamada, Shigetoshi Sugawa, Herzl Aharoni, Tadahiro Ohmi (1.Department of Electronic Engineering Graduated school of Engineering, Tohoku University, 2.New Industry Creation Hatchery Center, Tohoku University, 3.Department of Electrical and Computer Engineering, Ben-Gurion University of the Negev)

https://doi.org/10.7567/SSDM.2001.A-4-4