[A-9-1] Uncooled Infrared Focal Plane Arrays Using Micromachining Technology
Masafumi Kimata, Tomohiro Ishikawa, Yoshiyuki Nakaki, Masashi Ueno, Hirofumi Yagi, Hisatoshi Hata, Osamu Kaneda, Takanori Sone
(1.Advanced Technology R & D Center, Mitsubishi Electric Corporation)
https://doi.org/10.7567/SSDM.2001.A-9-1
