[A-9-1] Uncooled Infrared Focal Plane Arrays Using Micromachining Technology
Masafumi Kimata、Tomohiro Ishikawa、Yoshiyuki Nakaki、Masashi Ueno、Hirofumi Yagi、Hisatoshi Hata、Osamu Kaneda、Takanori Sone
(1.Advanced Technology R & D Center, Mitsubishi Electric Corporation)
https://doi.org/10.7567/SSDM.2001.A-9-1
