The Japan Society of Applied Physics

[B-4-2] Mechanism of Threshold Voltage Shift (ΔVth) Caused by Negative Bias Temperature Instability (NBTI) in Deep Sub-Micron pMOSFETs

Chuan H. Liu, Ming T. Lee, Chih-Yung Lin, Jenkon Chen, Klaus Schruefer, Thomas Schiml, Anastasios A. Katsetos, Zhijian Yang, Nivo Rovedo, Terence B. Hook, Clement Wann (1.United Microelectronics Corp., 2.Infineon Technologies Corp., 3.IBM Microelectronics Division)