[B-5-3] Characterization of the Co-Silicide Penetration Depth into the Junction Area

Hi-Deok Lee, Keun-Koo Kang, Myoung-Jun Jang, Joo-Hyoung Lee, Seong-Hyun Park, Key-Min Lee, Ki-Seok Yoon, Jung-Hoon Choi, Geun-Suk Park, Young-Jin Park (1.Dept. of Electronics Engineering, Chungnam National University, 2.Dept. of Physics, Chungbuk National University, 3.Memory R&D Division, Hynix Semiconductor Co.)

https://doi.org/10.7567/SSDM.2001.B-5-3