Electrical Properties and Solid-Phase Reactions in Ni/Si(100) Contacts

Yoshinori Tsuchiya; Akihiro Tobioka; Osamu Nakatsuka; Hiroya Ikeda; Akira Sakai; Shigeaki Zaima; Yukio Yasuda

doi:https://doi.org/10.7567/SSDM.2001.B-5-4

[B-5-4] Electrical Properties and Solid-Phase Reactions in Ni/Si(100) Contacts

Yoshinori Tsuchiya、Akihiro Tobioka、Osamu Nakatsuka、Hiroya Ikeda、Akira Sakai、Shigeaki Zaima、Yukio Yasuda (1.Graduate School of Engineering, Nagoya University、2.Center of Cooperative Research in Advanced Science and Technology, Nagoya University)

https://doi.org/10.7567/SSDM.2001.B-5-4

2001 International Conference on Solid State Devices and Materials

[B-5-4] Electrical Properties and Solid-Phase Reactions in Ni/Si(100) Contacts