[B-6-5] Monolayer Nitridation of Si(001) Surfaces
Yukinori Morita, Takao Ishida, Hiroshi Tokumoto
(1.Joint Research Center for Atom Technology (JRCAT), 2.National Institute of Advanced Industrial Science and Technology (AIST))
https://doi.org/10.7567/SSDM.2001.B-6-5