Monolayer Nitridation of Si(001) Surfaces

Yukinori Morita; Takao Ishida; Hiroshi Tokumoto

doi:https://doi.org/10.7567/SSDM.2001.B-6-5

2001 International Conference on Solid State Devices and Materials

Sep 26, 2001 - Sep 28, 2001
Diamond Hotel, Tokyo, Japan

[B-6-5] Monolayer Nitridation of Si(001) Surfaces

Yukinori Morita, Takao Ishida, Hiroshi Tokumoto (1.Joint Research Center for Atom Technology (JRCAT), 2.National Institute of Advanced Industrial Science and Technology (AIST))

https://doi.org/10.7567/SSDM.2001.B-6-5

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