[B-7-3] Mechanism of Improved Thermal Stability of B in Poly-SiGe Gate on SiON
Taizoh Sadoh, Fitrianto, Atsushi Kenjo, Akihiro Miyauchi, Hironori Inoue, Masanobu Miyao
(1.Department of Electronics, Kyushu University, 2.Hitachi Research Laboratory, Hitachi)
https://doi.org/10.7567/SSDM.2001.B-7-3
