[B-7-4] P-Doping into Strain-Induced Si1-yCy Epitaxial Films Grown by Low Temperature Chemical Vapor Deposition

Shuhei Yagi, Katsuya Abe, Takashi Okabayashi, Akira Yamada, Makoto Konagai (1.Department of Physical Electronics, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.2001.B-7-4