2001 International Conference on Solid State Devices and Materials

Sep 26, 2001 - Sep 28, 2001
Diamond Hotel, Tokyo, Japan

[B-8-4] Interfacial Reactions of ZrO2/SiO2/Si Layered Structures

Heiji Watanabe (1.Silicon Systems Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.2001.B-8-4

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