[B-8-5] Preparation and Characterization of High-k Lanthanoid Oxide Thin Films Deposited by Pulsed Laser Deposition

Satoshi Kitai、Osamu Maida、Takeshi Kanashima、Masanori Okuyama (1.Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering Science, Osaka University、2.The Institute of Scientific and Industrial Research, Osaka University)

https://doi.org/10.7567/SSDM.2001.B-8-5