[C-5-3] Highly Stable Microprocessor Using SiGe Inserted SOI MOSFET

Hee-Sung Kang, Young-Wug Kim, Kong-Soo Chung, Ki-Mun Nam, Geum-Jong Bae, Nae-In Lee, Kwang-Pyuk Suh (1.Technology Development Group, SOC Technology, System LSI Division, Samsung Electronics, 2.Process Development Team, Samsung Electronics)

https://doi.org/10.7567/SSDM.2001.C-5-3