Novel PZT Crystallization Technique by Using Flash Lamp for FeRAM Embedded LSIs and 1Tr FeRAM Devices

Koji Yamakawa; Keitaro Imai; Osamu Arisumi; Tsunetoshi Arikado; Masaki Yoshioka; Tatsushi Owada; Katsuya Okumura

doi:https://doi.org/10.7567/SSDM.2001.C-8-1

[C-8-1] Novel PZT Crystallization Technique by Using Flash Lamp for FeRAM Embedded LSIs and 1Tr FeRAM Devices

Koji Yamakawa、Keitaro Imai、Osamu Arisumi、Tsunetoshi Arikado、Masaki Yoshioka、Tatsushi Owada、Katsuya Okumura (1.Process & Manufacturing Engineering Center, Toshiba Corp., Semiconductor Company、2.Lamp Technology & Engineering Division, Ushio Inc.)

https://doi.org/10.7567/SSDM.2001.C-8-1

2001 International Conference on Solid State Devices and Materials

[C-8-1] Novel PZT Crystallization Technique by Using Flash Lamp for FeRAM Embedded LSIs and 1Tr FeRAM Devices