The Japan Society of Applied Physics

[C-8-1] Novel PZT Crystallization Technique by Using Flash Lamp for FeRAM Embedded LSIs and 1Tr FeRAM Devices

Koji Yamakawa, Keitaro Imai, Osamu Arisumi, Tsunetoshi Arikado, Masaki Yoshioka, Tatsushi Owada, Katsuya Okumura (1.Process & Manufacturing Engineering Center, Toshiba Corp., Semiconductor Company, 2.Lamp Technology & Engineering Division, Ushio Inc.)

https://doi.org/10.7567/SSDM.2001.C-8-1