The Japan Society of Applied Physics

[C-9-1] Trap Density Dependent Inelastic Tunneling in Stress-Induced Leakage Current

Shigeyasu Uno, Kazuaki Deguchi, Yoshinari Kamakura, Kenji Taniguchi (1.Department of Electronics and Information Systems, Osaka University)

https://doi.org/10.7567/SSDM.2001.C-9-1