[D-6-6] Reactive Ion Beam Etching of GaN and AlGaN for Nano-structure Fabrication Using Methane-Based Gas Mixtures
Makoto Endo, Zhi Jin, Seiya Kasai, Hideki Hasegawa
(1.Research Center for Integrated Quantum Electronics and Graduate School of Electronics and Information Engineering Hokkaido University)
https://doi.org/10.7567/SSDM.2001.D-6-6