[D-9-5] Simple Fabrication of Silicon Nanopyramids for High Performance Field Emitter Array

T. Tanii、T. Goto、T. Iida、M. Koh-Masahara、I. Ohdomari (1.School of Science and Engineering, Waseda University、2.Kagami Memorial Laboratory for Materials Science and Technology, Waseda University、3.National Institute of Advanced Industrial Science and Technology)

https://doi.org/10.7567/SSDM.2001.D-9-5