[D-9-5] Simple Fabrication of Silicon Nanopyramids for High Performance Field Emitter Array

T. Tanii, T. Goto, T. Iida, M. Koh-Masahara, I. Ohdomari (1.School of Science and Engineering, Waseda University, 2.Kagami Memorial Laboratory for Materials Science and Technology, Waseda University, 3.National Institute of Advanced Industrial Science and Technology)

https://doi.org/10.7567/SSDM.2001.D-9-5