[E-6-1] Application of InAs Free-Standing Membranes for Electromechanical Systems

Hiroshi Yamaguchi, Remi Dreyfus, Sen Miyashita, Yoshiro Hirayama (1.NTT Basic Research Laboratories, 2.Ecole Superierure de Physique et de Chimie Industrielles de la ville de Paris, 3.NTT Advanced Technology, 4.Core Research for Evolutional Science & Technology (CREST), JST)

https://doi.org/10.7567/SSDM.2001.E-6-1