[E-6-2] N/Ge Co-Implantation into GaN for N-Type Doping

Yoshitaka Nakano, Tetsu Kachi, Takashi Jimbo (1.Toyota Central Research and Development Laboratories, Inc., 2.Department of Environmental Technology and Urban Planning, 3.Research Center for Micro-Structure Devices, Nagoya Institute of Technology)

https://doi.org/10.7567/SSDM.2001.E-6-2