The Japan Society of Applied Physics

[F-1-6] A Physical Model for Hole Direct Tunneling Currents Through Ultrathin Gate Dielectrics in Advanced CMOS Devices

Y. T. Hou、M. F. Li、W. H. Lai、Y. Jin (1.Silicon Nano Device Lab, Department of Electrical & Computer Engineering National University of Singapore、2.Chartered Semiconductor Manufacturing Ltd)

https://doi.org/10.7567/SSDM.2001.F-1-6