[LA-1-2] Influence of Organic Contamination on Reliability and Trap Generation in MOS Devices

T. Yoshino, S. Yokoyama, T. Fujii, K. Shibahara, A. Nakajima, T. Kikkawa, H. Sunami, Q. D. M. Khosru (1.Research Center for Nanodevices and Systems, Hiroshima University, 2.EBARA Research Co., Ltd.)

https://doi.org/10.7567/SSDM.2001.LA-1-2