Excimer Laser Crystallization of Amorphous ITO Thin Film Deposited on PES

Y. H. Son; M. S. Park; S. J. Han; J. H. Lee; Y. H. Kim; S. E. Nam; H. J. Kim

doi:https://doi.org/10.7567/SSDM.2001.LF-1-1

2001 International Conference on Solid State Devices and Materials

Sep 26, 2001 - Sep 28, 2001
Diamond Hotel, Tokyo, Japan

[LF-1-1] Excimer Laser Crystallization of Amorphous ITO Thin Film Deposited on PES

Y. H. Son, M. S. Park, S. J. Han, J. H. Lee, Y. H. Kim, S. E. Nam, H. J. Kim (1.Dept. of Metallurgical Engineering and Materials Science, Hong-Ik University)

https://doi.org/10.7567/SSDM.2001.LF-1-1

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