[P-1-10] Effect of Plasma Nitridation on the Conduction Mechanism of Ta2O5 Gate Dielectric

Woo Hyung Lee, Kiju Im, Sanghun Joen, Hyunsang Hwang (1.Department of Materials Science and Engineering, Kwangju Institute of Science and Technology)

https://doi.org/10.7567/SSDM.2001.P-1-10