Nucleation and Growth Control of Al-CVD for Dual-Damascene Application

T. Iino; M. Sugiyama; H. Itoh; J. Aoyama; H. Komiyama; Y. Shimogaki

doi:https://doi.org/10.7567/SSDM.2001.P-1-11

[P-1-11] Nucleation and Growth Control of Al-CVD for Dual-Damascene Application

T. Iino、M. Sugiyama、H. Itoh、J. Aoyama、H. Komiyama、Y. Shimogaki (1.Department of Materials Engineering, University of Tokyo、2.Department of Chemical System Engineering, University of Tokyo、3.Semiconductor Technology Academic Research Center)

https://doi.org/10.7567/SSDM.2001.P-1-11

2001 International Conference on Solid State Devices and Materials

[P-1-11] Nucleation and Growth Control of Al-CVD for Dual-Damascene Application